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Fabrication and structural characterization of ordered magnetic nanodot arrays over large area

2005, Bulletin of the American Physical Society

Abstract

Fabrication and structural characterization of ordered magnetic nanodot arrays over large area 1 CHANG-PENG LI, IGOR V. ROSHCHIN, XAVIER BATLLE 2 , IVAN K. SCHULLER, Physics Dept., UCSD, La Jolla, CA, USA -Self-assembly of nanopores in anodized alumina is of much interest as a controlled fabrication method of magnetic nanostructures for fundamental studies and potential magnetic recording applications. Up to 10 micron thick Al films are e-beam evaporated on N-type Si substrate for porous alumina mask fabrication. By controlling anodization conditions, hexagonally ordered pores with 8-125 nm diameter and 20-160 nm periodicity are formed over ∼1 cm 2 area. SEM and AFM characterization shows that the pores are distributed within ∼10% standard deviation from the mean value. Fe magnetic nanodot arrays are fabricated by subsequent e-beam evaporation of Fe and mask lift-off. The smallest dot array fabricated this way is 44 nm, which corresponds to 0.4 Tbit/in 2 density. The nanodot periodicity is confirmed by small angle neutron scattering measurements. For nanoscale exchange bias studies, Fe/FeF 2 bilayer nanodot array are prepared using low angle Ar ion etching instead of the lift-off.